Targeting molecules

When it comes to contamination in cleanrooms, the primary monitoring focus is usually on ‘particles’. This is hardly surprising, given that there are millions of particles floating around in the air – per cubic metre, mind you. However, there is another form of contamination that is often underestimated during the planning and construction of cleanrooms: airborne molecular contamination (AMC).

These are gaseous or vapour-form substances, often emissions from materials, process chemicals or volatile organic compounds. Molecular contaminants are usually much smaller than particles and can lead to uncontrollable chemical reactions, corrosion or the formation of deposits on surfaces. They can cause significant problems, particularly in semiconductor manufacturing.

Published: March 2026